ENVIRONMENTAL STABILITY OF NITROGEN CONTAINING PLASMA-POLYMERIZED HEXAMETHYLDISILOXANE FILMS

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F18%3A00101810" target="_blank" >RIV/00216224:14310/18:00101810 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
ENVIRONMENTAL STABILITY OF NITROGEN CONTAINING PLASMA-POLYMERIZED HEXAMETHYLDISILOXANE FILMS
Original language description
Nitrogen incorporated organosilicon films were prepared by means of plasma enhanced chemical vapor deposition using capacitively coupled RF glow discharges in mixtures of hexamethyldisiloxane and nitrogen. The flow rate of nitrogen was 2-10 sccm and the flow rate of hexamethyldisiloxane was 0.3-0.4 sccm. The power supply of CCP was 50 W. The environmental stability of the deposited films was studied using confocal microscopy, spectroscopic ellipsometry and FTIR (Fourier Transform Infrared Spectroscopy). The humidity induced structure changes resulted in substantial change of mechanical properties of the studied films. The mechanical properties were studied using nanoindentation techniques.
Czech name
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Czech description
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2018
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
9TH INTERNATIONAL CONFERENCE ON NANOMATERIALS - RESEARCH & APPLICATION (NANOCON 2017)
ISBN
9788087294819
ISSN
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e-ISSN
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Number of pages
6
Pages from-to
842-847
Publisher name
TANGER Ltd
Place of publication
Brno
Event location
Brno
Event date
Oct 18, 2017
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
000452823300140

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