Degradation of mechanical properties of nitrogen-doped organosilicon plasma polymers induced by post-deposition reactions

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F25%3A00142412" target="_blank" >RIV/00216224:14310/25:00142412 - isvavai.cz</a>

Result on the web

<a href="https://www.sciencedirect.com/science/article/pii/S2468023025015895" target="_blank" >https://www.sciencedirect.com/science/article/pii/S2468023025015895</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.surfin.2025.107337" target="_blank" >10.1016/j.surfin.2025.107337</a>

Result language

angličtina

Original language name

Degradation of mechanical properties of nitrogen-doped organosilicon plasma polymers induced by post-deposition reactions

Original language description

Organosilicon plasma-polymer coatings based on hexamethyldisiloxane (HMDSO) are versatile materials with a wide range of applications. However, the degradation of their mechanical properties has not been extensively studied, despite growing application-oriented interest. This study focuses on evaluating the aging of mechanical properties in plasma-polymerized hexamethyldisiloxane (ppHMDSO) coatings, driven by structural changes over time. We investigate the chemical interactions of nitrogen-doped organosilicon thin films with ambient atmosphere under controlled laboratory conditions. These films were prepared via plasma-enhanced chemical vapor deposition (PECVD) using a capacitively coupled radio-frequency (RF) glow discharge in a mixture of HMDSO and N2. To assess the time-dependent mechanical properties of these rapidly degrading plasma polymers, nanoindentation and microindentation techniques were employed. Quasi-static partial unloading (QSpul) experiments and differential hardness (HD) measurements were also conducted to analyze how mechanical properties evolve with structural changes during aging. Trends in the mechanical properties were correlated with FTIR and XPS analyses to provide insights into the underlying aging mechanisms of nitrogen-doped HMDSO thin films.

Czech name

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Czech description

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Type

J_imp - Article in a specialist periodical, which is included in the Web of Science database

CEP classification

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OECD FORD branch

10305 - Fluids and plasma physics (including surface physics)

Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2025

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Surfaces and Interfaces

ISSN

2468-0230

e-ISSN

—

Volume of the periodical

74

Issue of the periodical within the volume

October

Country of publishing house

NL - THE KINGDOM OF THE NETHERLANDS

Number of pages

12

Pages from-to

107337

UT code for WoS article

001584876000007

EID of the result in the Scopus database

2-s2.0-105016172847