Ellipsometric characterization of inhomogeneous non-stoichiometric silicon nitride films
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14740%2F13%3A00065705" target="_blank" >RIV/00216224:14740/13:00065705 - isvavai.cz</a>
Result on the web
<a href="http://onlinelibrary.wiley.com/doi/10.1002/sia.5250/abstract" target="_blank" >http://onlinelibrary.wiley.com/doi/10.1002/sia.5250/abstract</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1002/sia.5250" target="_blank" >10.1002/sia.5250</a>
Alternative languages
Result language
angličtina
Original language name
Ellipsometric characterization of inhomogeneous non-stoichiometric silicon nitride films
Original language description
Variable-angle spectroscopic ellipsometry is employed for the optical characterization of non-stoichiometric silicon nitride thin films exhibiting inhomogeneity formed by refractive index and extinction index changes through the film thickness. For all the film samples, the best fit of the experimental data is achieved if, in addition to the inhomogeneity, an overlayer or roughness of the upper boundary is included. However, distinguishing of these two defects is found not to be possible. The influenceof working gas ratio, deposition temperature and on/off time on the film properties is studied. The refractive index and extinction coefficient is found to increase with increasing working gas ratio and less significantly with decreasing deposition temperature. It is also found that the inhomogeneity increases with decreasing deposition temperature, and the deposition rate of the films decreases with increasing working gas ratio.
Czech name
—
Czech description
—
Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BH - Optics, masers and lasers
OECD FORD branch
—
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2013
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Surface and Interface Analysis
ISSN
0142-2421
e-ISSN
—
Volume of the periodical
45
Issue of the periodical within the volume
7
Country of publishing house
US - UNITED STATES
Number of pages
5
Pages from-to
1188-1192
UT code for WoS article
000320332300018
EID of the result in the Scopus database
—