Ellipsometric characterization of inhomogeneous non-stoichiometric silicon nitride films

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49610040%3A_____%2F13%3A%230000015" target="_blank" >RIV/49610040:_____/13:#0000015 - isvavai.cz</a>

Result on the web

<a href="http://wileyonlinelibrary.com/journal/sia" target="_blank" >http://wileyonlinelibrary.com/journal/sia</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1002/sia.5250" target="_blank" >10.1002/sia.5250</a>

Result language

angličtina

Original language name

Ellipsometric characterization of inhomogeneous non-stoichiometric silicon nitride films

Original language description

Variable-angle spectroscopic ellipsometry is employed for the optical characterization of non-stoichiometric silicon nitride thin films exhibiting inhomogeneity formed by refractive index and extinction index changes through the film thickness. For all the film samples, the best fit of the experimental data is achieved if, in addition to the inhomogeneity, an overlayer or roughness of the upper boundary is included. However, distinguishing of these two defects is found not to be possible. The influenceof working gas ratio, deposition temperature and on/off time on the film properties is studied. The refractive index and extinction coefficient is found to increase with increasing working gas ratio and less significantly with decreasing deposition temperature. It is also found that the inhomogeneity increases with decreasing deposition temperature, and the deposition rate of the films decreases with increasing working gas ratio. The influence of the on/off time on the film properties is

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BL - Plasma physics and discharge through gases

OECD FORD branch

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Project

<a href="/en/project/FR-TI1%2F168" target="_blank" >FR-TI1/168: High efficient colour solar cells for architectural applications</a><br>

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2013

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Surface and Interface Annalysis

ISSN

1096-9918

e-ISSN

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Volume of the periodical

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Issue of the periodical within the volume

2013-02-21

Country of publishing house

US - UNITED STATES

Number of pages

5

Pages from-to

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UT code for WoS article

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EID of the result in the Scopus database

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