Humidity resistant hydrogenated carbon nitride films

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14740%2F13%3A00066624" target="_blank" >RIV/00216224:14740/13:00066624 - isvavai.cz</a>
Alternative codes found
RIV/61389005:_____/13:00397640 RIV/68081731:_____/13:00397640 RIV/00216305:26620/13:PU103576
Result on the web
<a href="http://www.sciencedirect.com/science/article/pii/S0169433213005011" target="_blank" >http://www.sciencedirect.com/science/article/pii/S0169433213005011</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.apsusc.2013.03.033" target="_blank" >10.1016/j.apsusc.2013.03.033</a>

Result language
angličtina
Original language name
Humidity resistant hydrogenated carbon nitride films
Original language description
The aim of this study is to prepare the hydrogenated carbon nitrides films which possess good adhesion to silicon substrates and stability in humid surroundings. The films were prepared by magnetron sputtering from pure graphite target in a nitrogen-hydrogen discharge. Two main factors can lead to delamination of the films. The first is the high value of residual stress and the second is the absorption of moisture into the bulk and their affect on films/substrates interface. Both factors were eliminatedby adding hydrogen and post-deposition annealing in the vacuum. The influence of annealing (to 200, 400, 600, 800 and 1000 degrees C) on chemical composition and microstructure was studied by various methods. For preparation of humidity (water) resistant films we have added 15% partial pressure of hydrogen to nitrogen discharge and annealed the samples in vacuum to minimum temperature, which was 600 degrees C. The heating to 600 degrees C causes the increasing of carbon -nitride ratio f
Czech name
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Czech description
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Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BM - Solid-state physics and magnetism
OECD FORD branch
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2013
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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