Strain relaxation in Ge microcrystals studied by high-resolution X-ray diffraction
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14740%2F16%3A00089508" target="_blank" >RIV/00216224:14740/16:00089508 - isvavai.cz</a>
Result on the web
<a href="http://onlinelibrary.wiley.com/doi/10.1002/pssa.201532643/abstract" target="_blank" >http://onlinelibrary.wiley.com/doi/10.1002/pssa.201532643/abstract</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1002/pssa.201532643" target="_blank" >10.1002/pssa.201532643</a>
Alternative languages
Result language
angličtina
Original language name
Strain relaxation in Ge microcrystals studied by high-resolution X-ray diffraction
Original language description
Deposition on patterned substrates is a promising method for obtaining high quality, strain and defect free heteroepitaxial layers. In this paper we investigate the crystalline structure of quasi-continuous Ge layers consisting of closely spaced microcrystals on a Si substrate patterned in the form of a regular net of lithographically defined squared based pillars. Lattice parameters, strain and degree of relaxation of the Ge microcrystals are measured by standard high-resolution X-ray diffraction using reciprocal space mapping. In particular, we focus on the impact of Si pillar size and spacing on the Ge crystal quality by analyzing how the bending of crystal lattice planes caused by thermal stress relaxation and random crystal tilts affect the width of the diffraction peaks.
Czech name
—
Czech description
—
Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BM - Solid-state physics and magnetism
OECD FORD branch
—
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2016
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE
ISSN
1862-6300
e-ISSN
—
Volume of the periodical
213
Issue of the periodical within the volume
2
Country of publishing house
DE - GERMANY
Number of pages
7
Pages from-to
463-469
UT code for WoS article
000370188700038
EID of the result in the Scopus database
—