Analysis of pulsed laser deposited amorphous chalcogenide film thickness distribution: Plume deflection angle dependence

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216275%3A25310%2F18%3A39912468" target="_blank" >RIV/00216275:25310/18:39912468 - isvavai.cz</a>
Result on the web
<a href="https://doi.org/10.1016/j.jnoncrysol.2017.11.022" target="_blank" >https://doi.org/10.1016/j.jnoncrysol.2017.11.022</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.jnoncrysol.2017.11.022" target="_blank" >10.1016/j.jnoncrysol.2017.11.022</a>

Result language
angličtina
Original language name
Analysis of pulsed laser deposited amorphous chalcogenide film thickness distribution: Plume deflection angle dependence
Original language description
Pulsed laser deposition exploiting a KrF excimer laser was used to fabricate amorphous As-S thin films from bulk As2S3 glass target. Thickness profile of the film was extracted from variable angle spectroscopic ellipsometry data. The dependence of thickness distribution of prepared thin layer on laser beam plume deflection angle was evaluated and corresponding equations were suggested.
Czech name
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Czech description
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Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10305 - Fluids and plasma physics (including surface physics)

Project
<a href="/en/project/GA16-17921S" target="_blank" >GA16-17921S: Heterostructures based on chalcogenides for nonlinear optics and optical sensors</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2018
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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