The World Scientific Reference of Amorphous Materials, Volume 1: Structure, Properties, Modeling and Applications of Amorphous Chalcogenides, CHAPTER 19: High-Resolution Photoresists

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216275%3A25310%2F21%3A39917667" target="_blank" >RIV/00216275:25310/21:39917667 - isvavai.cz</a>
Result on the web
<a href="https://www.worldscientific.com/doi/10.1142/9789811215575_0019" target="_blank" >https://www.worldscientific.com/doi/10.1142/9789811215575_0019</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1142/9789811215575_0019" target="_blank" >10.1142/9789811215575_0019</a>

Result language
angličtina
Original language name
The World Scientific Reference of Amorphous Materials, Volume 1: Structure, Properties, Modeling and Applications of Amorphous Chalcogenides, CHAPTER 19: High-Resolution Photoresists
Original language description
Chalcogenide glass thin films are frequently sensitive to various kinds of radiation (e.g., ultraviolet [UV]/visible [VIS], X-ray, electron beam). Structure of the material can be significantly altered by suitable irradiation causing either advanced polymerization or bond cleavage. Structural changes consequently influence the glass resistance to the developer resulting in selective etching, which makes chalcogenide glasses suitable material for micro/nano patterning. Chalcogenide glasses can act as both positive and negative photoresist in dependence on many parameters such as composition of the glass and the developer, method used for thin film deposition, thermal history of the sample, and others. Structural and chemical mechanisms accountable for significant differences in chemical resistance are discussed in detail. Multiple examples of patterned thin films applicable either directly in optics or serving as traditional photoresist transferring the desired structure to the undelaying substrate, are provided.
Czech name
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Czech description
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2021
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Book/collection name
The World Scientific Reference Of Amorphous Materials : Structure, Properties, Modeling And Main Applications. Vol. 1
ISBN
978-981-12-1555-1
Number of pages of the result
29
Pages from-to
651-679
Number of pages of the book
7364
Publisher name
World Scientific Publishing Co.
Place of publication
Singapur
UT code for WoS chapter
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