Optical characterization of non-uniform thin films using imaging spectrophotometry
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26210%2F05%3APU54691" target="_blank" >RIV/00216305:26210/05:PU54691 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Optical characterization of non-uniform thin films using imaging spectrophotometry
Original language description
In this paper the method of imaging spectrophotometry enabling us to characterize non-absorbing thin films non-uniform in the optical parameters is described. This method is based on interpreting the spectral dependences of the local absolute reflectances measured at the normal incidence of light. It is shown how to determine the area distribution of thickness and refractive index of the non-absorbing non-uniform thin films by treating these reflectances. Moreover, the generalization of the method for the optical characterization of slightly absorbing non-uniform thin films is also indicated. Furthermore, the two-channel imaging spectrophotometer enabling us to apply the method of imaging reflectometry is described. The procedure for determining the spectral dependences of the local absolute reflectance in the points aligned in a matrix situated on the illuminated area of the non-uniform thin film by means of the spectrophotometer is also presented. The practical advantages of the meth
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
BH - Optics, masers and lasers
OECD FORD branch
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Result continuities
Project
<a href="/en/project/GA101%2F04%2F2131" target="_blank" >GA101/04/2131: Realization of thelaboratory digital spectrophotometer for the wide spectral region</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2005
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Proceedings of SPIE - Advances in Optical Thin Films II
ISBN
0-8194-5951-8
ISSN
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e-ISSN
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Number of pages
9
Pages from-to
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Publisher name
Society of Photo-Optical Instrumentation Engineers (SPIE)
Place of publication
Bellingham, Washington, USA
Event location
Jena
Event date
Sep 12, 2005
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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