Vacuum micromanipulator upgrading a scanning electron microscope to a new fabrication and characterization tool

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26210%2F26%3A0198114" target="_blank" >RIV/00216305:26210/26:0198114 - isvavai.cz</a>
Result on the web
<a href="https://www.sciencedirect.com/science/article/pii/S0042207X25002805?via%3Dihub" target="_blank" >https://www.sciencedirect.com/science/article/pii/S0042207X25002805?via%3Dihub</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.vacuum.2025.114290" target="_blank" >10.1016/j.vacuum.2025.114290</a>

Result language
angličtina
Original language name
Vacuum micromanipulator upgrading a scanning electron microscope to a new fabrication and characterization tool
Original language description
A hand-operated micromanipulator extending the capabilities of high-vacuum scanning electron microscopes (SEMs) with optical measurement modes, electrical contacting of structures, and mechanical manipulation was developed. This micromanipulator supports combined four degrees of freedom rotational and sliding movements, achieving positioning accuracy and repeatability to the center of the SEM view-field within the requested ten micrometers. It integrates a manipulator probe or optical fiber that can be easily maneuvered over the sample area inside the SEM chamber. These enable various unique applications, including mechanical manipulation, local electrical probing, cathodoluminescence measurements, local gas injection via photonic crystal optical fiber (PCF), and local thin film heating and evaporation, respectively. Thus, the seamlessly integrated in-house-built micromanipulator facilitates real-time observation and modification of micro- and nanostructures with high precision and versatility, expanding the capabilities of conventional SEMs.
Czech name
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Czech description
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Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
20301 - Mechanical engineering

Project
<a href="/en/project/FW03010504" target="_blank" >FW03010504: Development of in-situ techniques for characterization of materials and nanostructures</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>S - Specificky vyzkum na vysokych skolach

Publication year
2025
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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