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Detection of Backscattered Electrons in Low Voltage Scanning Electron Microscope

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F04%3APU41779" target="_blank" >RIV/00216305:26220/04:PU41779 - isvavai.cz</a>

  • Result on the web

  • DOI - Digital Object Identifier

Alternative languages

  • Result language

    angličtina

  • Original language name

    Detection of Backscattered Electrons in Low Voltage Scanning Electron Microscope

  • Original language description

    This paper deals with detection of backacattered electrons in scanning electron microscope when the accelerating voltage is 5 kV and less. New detection system for low energy backscattered electrons is shown.

  • Czech name

    Detekce BSE v nízkonapěťovém rastrovacím elektronovém mikroskopu.

  • Czech description

    Práce se zabývá problémem detekce BSE v SEM pri urychlovacím napětí 5 kV a mensím. V práci je popsán nový detekční systém zpětně odražených elektronů.

Classification

  • Type

    D - Article in proceedings

  • CEP classification

    JA - Electronics and optoelectronics

  • OECD FORD branch

Result continuities

  • Project

    <a href="/en/project/IBS2065107" target="_blank" >IBS2065107: Scanning electron microscopy for research of structure of wet materials</a><br>

  • Continuities

    P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Others

  • Publication year

    2004

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Article name in the collection

    Proceedings of the 10th conference Student EEICT 2004.

  • ISBN

    80-214-2636-5

  • ISSN

  • e-ISSN

  • Number of pages

    4

  • Pages from-to

    693-696

  • Publisher name

    Vysoké učení technické v Brně

  • Place of publication

    Brno

  • Event location

    Brno

  • Event date

    Jun 29, 2004

  • Type of event by nationality

    CST - Celostátní akce

  • UT code for WoS article