INFLUENCE OF SCANNING RATE ON QUALITY OF AFM IMAGE: STUDY OF SURFACE STATISTICAL METRICS
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F17%3APU124490" target="_blank" >RIV/00216305:26220/17:PU124490 - isvavai.cz</a>
Result on the web
<a href="http://onlinelibrary.wiley.com/doi/10.1002/jemt.22945/epdf" target="_blank" >http://onlinelibrary.wiley.com/doi/10.1002/jemt.22945/epdf</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1002/jemt.22945" target="_blank" >10.1002/jemt.22945</a>
Alternative languages
Result language
angličtina
Original language name
INFLUENCE OF SCANNING RATE ON QUALITY OF AFM IMAGE: STUDY OF SURFACE STATISTICAL METRICS
Original language description
The purpose of this work is to study the dependence of AFM-data reliability on scanning rate. The three-dimensional (3-D) surface topography of the samples with different micro-motifs is investigated. The analysis of surface metrics for estimation of artifacts from inappropriate scanning rate is presented. Fractal analysis was done by cube counting method and evaluation of statistical metrics was carrying out on the basis of AFM-data. Combination of quantitate parameters is also presented in graphs for every measurement. The results indicate that the sensitivity to scanning rate growths with fractal dimension of the sample. This approach allows describing the distortion of the images against scanning rate and could be applied for dependences on the other measurement parameters. The paper explains the relevance and comparison of fractal and statistical surface parameters for characterization of data distortion caused by inappropriate choice of scanning rate.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
20201 - Electrical and electronic engineering
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2017
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Microscopy research and technique
ISSN
1059-910X
e-ISSN
1097-0029
Volume of the periodical
80
Issue of the periodical within the volume
7
Country of publishing house
US - UNITED STATES
Number of pages
11
Pages from-to
1-11
UT code for WoS article
000419168300010
EID of the result in the Scopus database
2-s2.0-85034067831