Modeling Electrostatic MEMS Actuator

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F21%3APU142731" target="_blank" >RIV/00216305:26220/21:PU142731 - isvavai.cz</a>
Alternative codes found
RIV/60162694:G43__/21:00557742
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Modeling Electrostatic MEMS Actuator
Original language description
The paper deals with a mathematical model of electrostatic MEMS (Micro-Electro-Mechanical Systems) actuator with an associated mechanical system. The model mimics the behavior of a commercial MEMS-driven micromirror. It is shown that the electric port of the electrostatic comb drive can be correctly modeled as a generic memcapacitor whose state equation describes the dynamic behavior of the cooperating mechanical subsystem. The so-called narrow-band frequency-dependent hysteresis, associated with such types of MEMS, is analyzed.
Czech name
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Czech description
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Project
<a href="/en/project/VI20192022173" target="_blank" >VI20192022173: Robust System of Optical Wireless Communication</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2021
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
2021 28th IEEE International Conference on Electronics, Circuits, and Systems (ICECS) Proceedings
ISBN
978-1-7281-8281-0
ISSN
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e-ISSN
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Number of pages
5
Pages from-to
1-5
Publisher name
IEEE
Place of publication
Dubai, UAE
Event location
Dubai
Event date
Nov 28, 2021
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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