Noise in piezoresistive pressure sensors
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26620%2F15%3APU117243" target="_blank" >RIV/00216305:26620/15:PU117243 - isvavai.cz</a>
Result on the web
<a href="https://ieeexplore.ieee.org/document/7288591" target="_blank" >https://ieeexplore.ieee.org/document/7288591</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1109/ICNF.2015.7288591" target="_blank" >10.1109/ICNF.2015.7288591</a>
Alternative languages
Result language
angličtina
Original language name
Noise in piezoresistive pressure sensors
Original language description
In this paper we present the results of noise analysis in piezoresistive ceramic pressure sensors (CPSs) prepared by low temperature co-fired ceramics (LTCC) technology. For this study a piezoresistive CPSs in a full Wheatstone-bridge configuration were prepared. Low frequency noise measurements can be used for the quality evaluation of CPSs. The critical and non-critical defects could be determined from the noise measurements. Increased value of spectral density of sensor output voltage fluctuation gives the information about the cracks and structural defects in sensing resistor’s structure as well as about the crack in sensor’s diaphragm. We propose parallel/series configuration of resistors for measurement of particular sensing resistor influence on the total sensor noise. In this case the noise spectral density of single resistor in parallel to three resistors in series is 8 to 10times higher comparing to the noise spectral density of each of these three resistors in series. Then the sensing resistors with structural defects could be identified from the noise measurements.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
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OECD FORD branch
20201 - Electrical and electronic engineering
Result continuities
Project
<a href="/en/project/ED1.1.00%2F02.0068" target="_blank" >ED1.1.00/02.0068: Central european institute of technology</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2015
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Noise and Fluctuation (ICNF)
ISBN
978-1-4673-8335-6
ISSN
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e-ISSN
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Number of pages
4
Pages from-to
1-4
Publisher name
IEEE
Place of publication
Neuveden
Event location
Sian (Xian)
Event date
Jun 2, 2015
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
000380427600056