Rapid Cross-sectioning of Challenging Samples Using a Combination of TRUE X-sectioning and the Rocking Stage Techniques
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F01733214%3A_____%2F17%3AN0000001" target="_blank" >RIV/01733214:_____/17:N0000001 - isvavai.cz</a>
Result on the web
<a href="https://ieeexplore.ieee.org/document/8060168/" target="_blank" >https://ieeexplore.ieee.org/document/8060168/</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1109/IPFA.2017.8060168" target="_blank" >10.1109/IPFA.2017.8060168</a>
Alternative languages
Result language
angličtina
Original language name
Rapid Cross-sectioning of Challenging Samples Using a Combination of TRUE X-sectioning and the Rocking Stage Techniques
Original language description
An advanced sample preparation protocol using Xe+ Plasma FIB for cross-sections wider than 400 µm is proposed. Challenging samples such as a BGA (CSP) or chip in a package often suffer from FIB milling artifacts. The results are unsatisfactory mainly due to different milling rates of the various materials (polyimide, tin, copper), ion beam induced ripples or due to significant topography. The process parameters of the proposed approach are compared with the standard methods with respect to cross-section quality as well as preparation time. The new approach is then combined with the Rocking stage which greatly improves cross-section quality.
Czech name
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Czech description
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Classification
Type
J<sub>ost</sub> - Miscellaneous article in a specialist periodical
CEP classification
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OECD FORD branch
21002 - Nano-processes (applications on nano-scale); (biomaterials to be 2.9)
Result continuities
Project
<a href="/en/project/TE01020233" target="_blank" >TE01020233: Advanced Microscopy and Spectroscopy Platform for Research and Development in Nano and Microtechnologies - AMISPEC</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2017
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
2017 IEEE 24th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)
ISSN
1946-1550
e-ISSN
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Volume of the periodical
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Issue of the periodical within the volume
2017
Country of publishing house
US - UNITED STATES
Number of pages
3
Pages from-to
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UT code for WoS article
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EID of the result in the Scopus database
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