Increasing FA Throughput in Challenging Samples Utilizing TRUE X-sectioning and the Rocking Stage

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F01733214%3A_____%2F17%3AN0000003" target="_blank" >RIV/01733214:_____/17:N0000003 - isvavai.cz</a>

Result on the web

<a href="https://asm.confex.com/asm/istfa17/webprogram/Paper44139.html" target="_blank" >https://asm.confex.com/asm/istfa17/webprogram/Paper44139.html</a>

DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Increasing FA Throughput in Challenging Samples Utilizing TRUE X-sectioning and the Rocking Stage

Original language description

An advanced sample preparation protocol using Xe+ Plasma FIB for increasing FA throughput is proposed. We prepared cross-sections of 400 μm and wider in challenging samples such as a BGA (CSP), bond wires in mold compound or a TSV array. These often suffer from FIB milling artifacts. The unsatisfactory quality of the cross-section face is mainly due to extremely different milling rates of the various materials (polyimide, tin, copper, mold compound, platinum), ion beam induced ripples [1] or due to significant surface topography. We explored the usability of the protocol for standard crosssections and also tested the preparation of TEM lamellae. The process parameters of the proposed approach were compared with the standard methods of Xe+ Plasma FIB FA with respect to preparation time and cross-section quality. Aiming for ultimate results, we incorporated the Rocking stage technique which also greatly improves cross-section quality.

Czech name

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Czech description

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Type

D - Article in proceedings

CEP classification

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OECD FORD branch

21002 - Nano-processes (applications on nano-scale); (biomaterials to be 2.9)

Project

<a href="/en/project/TE01020233" target="_blank" >TE01020233: Advanced Microscopy and Spectroscopy Platform for Research and Development in Nano and Microtechnologies - AMISPEC</a><br>

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2017

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection

ISTFA 2017: Proceedings from the 43rd International Symposium for Testing and Failure Analysis

ISBN

978-1-62708-150-4

ISSN

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e-ISSN

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Number of pages

5

Pages from-to

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Publisher name

ASM International

Place of publication

Pasadena

Event location

Pasadena

Event date

Jan 1, 2017

Type of event by nationality

WRD - Celosvětová akce

UT code for WoS article

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