Investigations of SnO2 thin films prepared by plasma oxidation.

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F44555601%3A13430%2F02%3A00001973" target="_blank" >RIV/44555601:13430/02:00001973 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Investigations of SnO2 thin films prepared by plasma oxidation.

Original language description

In this work, we have studied properties of SnO2 thin films produced by thermal evaporation of Sn films followed by in situ plasma oxidation. The layer properties were studied by atomic force microscopy, Rutherford backscattering spectrometry and X-ray photoelectron spectroscopy. The surface morphology of the tin films is characterized with a near flat-grain structure appearance and a root mean square rougness Rq - 12 nm. The typical grain size of the tin films was about 0,5 um. Surface morphology of the tin dioxide is characterized by a sharper grain structure with a higher roughness Rq - 14 nm.Th etypical grain size was about 0,2 um in this case. The SnO2 films prepared by plasma oxidation at long oxidation times led to a higher thickness of oxide layers and it varied from 37 to 65 nm when oxidation time varied from 10 and 20 min. This work gives information about the feasibility of presented diagnostic methods for characterization of SnO2 thin films prepared by plasma oxidation.

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BL - Plasma physics and discharge through gases

OECD FORD branch

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Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2002

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Vacuum

ISSN

0042-207X

e-ISSN

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Volume of the periodical

67

Issue of the periodical within the volume

3

Country of publishing house

GB - UNITED KINGDOM

Number of pages

7

Pages from-to

665-671

UT code for WoS article

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EID of the result in the Scopus database

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