Surface Characterization of Tin Oxide Thin Films for Gas Sensors Prepared by Plasma Oxidation

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F44555601%3A13430%2F03%3A00002342" target="_blank" >RIV/44555601:13430/03:00002342 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Surface Characterization of Tin Oxide Thin Films for Gas Sensors Prepared by Plasma Oxidation
Original language description
Thin SnO2 films have wide range of applications (electronics, special coatings, etc.). Mostly, it is used when conductivity and transparency is required or in gas sensors. Tin oxide films of unique properties and of high quality can be prepared usually by techniques such as chemical vapour deposition, spray pyrolysis, evaporation, and sputtering. In this work, we have studied properties of SnO2 thin films produced by a thermal evaporation of Sn films followed by in situ plasma oxidation. The post-deposition analysis of films includes Atomic Force Microscopy (AFM), Rutherford backscattering spectrometry (RBS), Secondary Ion Mass Spectrometry (SIMS).
Czech name
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Czech description
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Project
<a href="/en/project/OC%20527.50" target="_blank" >OC 527.50: Polymer Thin Films Study by AFM and Improvement of Plasma Diagnostics Methods</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year
2003
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
Proceedings of the 14 th Symposium of Application of Plasma Processes
ISBN
80-8040-195-0
ISSN
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e-ISSN
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Number of pages
2
Pages from-to
144-145
Publisher name
Military Academy
Place of publication
Liptovský Mikuláš
Event location
Liptovský Mikuláš
Event date
Jan 13, 2003
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
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