Properties of Magnetron Deposited Variable Fe Doped SnO2 Thin Films for Gas

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F44555601%3A13440%2F09%3A00004869" target="_blank" >RIV/44555601:13440/09:00004869 - isvavai.cz</a>
Result on the web
—
DOI - Digital Object Identifier
—

Result language
angličtina
Original language name
Properties of Magnetron Deposited Variable Fe Doped SnO2 Thin Films for Gas
Original language description
The Fe doped SnO2 thin films for gas sensors applications were deposited by RF magnetron cosputtering of SnO2 and Fe dopand using a single sputter target with a variable SnO2/Fe ratio in the argon gas. The coatings were deposited in two different off-axis positions. The first position, the angle between planes of the substrate and target was 30o from parallel plane where the upside of substrate was toward to the target to allow shadowing effects. The second position was selected to reduce a higher energy ion bombardment on the growing film by positioning substrate perpendicular to target. The surface morphology of the films was controlled from very smooth up to orange-peel like structure simply by RF power and the position of substrates. The Fe contentin coating was tunable in wide range by adjusting Fe ratio on the target and by variation of RF power. The Fe content was evaluated from XPS spectra by deconvolution of two overlapped peaks Sn 3p and Fe 2p and from RBS. Beam of He+ ions
Czech name
—
Czech description
—

Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2009
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
Book of Contributed Papers of 17th Symposium on Application of Plasma Processe- Visegrad Workshop on Research of Plasma Physics
ISBN
978-80-89186-46-4
ISSN
—
e-ISSN
—
Number of pages
2
Pages from-to
—
Publisher name
Comenius University in Bratislava; Humboldt-Club Slovakia Bratislava
Place of publication
Bratislava, Slovakia
Event location
Liptovský Ján, Slovakia
Event date
Jan 17, 2009
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
—

Similar results(10)