Preparation of pulsed DC magnetron deposited Fe-doped SnO2 coatings

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F44555601%3A13440%2F16%3A43887753" target="_blank" >RIV/44555601:13440/16:43887753 - isvavai.cz</a>

Result on the web

<a href="http://onlinelibrary.wiley.com/doi/10.1002/pssa.201532882/pdf" target="_blank" >http://onlinelibrary.wiley.com/doi/10.1002/pssa.201532882/pdf</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1002/pssa.201532882" target="_blank" >10.1002/pssa.201532882</a>

Result language

angličtina

Original language name

Preparation of pulsed DC magnetron deposited Fe-doped SnO2 coatings

Original language description

Iron-doped SnO2 coatings were deposited in a 50 kHz DCpulsed magnetron sputtering discharge. The pulses had a duration of 4 ms in selected gas mixtures from pure argon up to 60% of oxygen at a constant total pressure of 0.2 Pa. A single target of SnO2 with Fe inset was used. The mass spectrometry study detected the gas-related ions Ar?, O2 ? and O?, where the last one becomes the dominant positive ion at higher oxygen contents. Atomic oxygen ions had a higher energy as it resulted from the collision-caused dissociation on the target surface. The tin-related species were detected as Sn? and SnO?. SnO2 ? species were not detected. The deposition rate decreased by using gas mixtures with oxygen as well as the corresponding amount of Sn-related species in the plasma. The increase of oxygen also increased significantly the sheet resistance of the films. The XPS study showed that the iron concentration decreased by using additional oxygen. But the O/Sn ratio in the coatings was constant, contrary to the increased FeO/Fe ratio in the films. An additional analysis of the coatings by spectroscopic ellipsometry has shown a dependence of the polarizability and the permittivity on the amount of oxygen used during the deposition. In contrast, the study has found no such dependence for the absorption of the layers.

Czech name

—

Czech description

—

Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BL - Plasma physics and discharge through gases

OECD FORD branch

—

Project

<a href="/en/project/GA13-06989S" target="_blank" >GA13-06989S: Plasma-chemical modification of phyllosilicates for functional nanostructures</a><br>

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2016

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Physica Status Solidi A

ISSN

1862-6300

e-ISSN

—

Volume of the periodical

213

Issue of the periodical within the volume

9

Country of publishing house

DE - GERMANY

Number of pages

7

Pages from-to

2303-2309

UT code for WoS article

000388318600005

EID of the result in the Scopus database

—