Deposition and characterization of single magnetron deposited Fe:SnOx coatings

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F44555601%3A13440%2F15%3A43887147" target="_blank" >RIV/44555601:13440/15:43887147 - isvavai.cz</a>

Result on the web

<a href="http://dx.doi.org/10.1016/j.tsf.2015.11.009" target="_blank" >http://dx.doi.org/10.1016/j.tsf.2015.11.009</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.tsf.2015.11.009" target="_blank" >10.1016/j.tsf.2015.11.009</a>

Result language

angličtina

Original language name

Deposition and characterization of single magnetron deposited Fe:SnOx coatings

Original language description

Coatings deposited by magnetron co-sputtering from a single RF magnetron with a ceramic SnO2 target with iron inset in argon plasma were studied. The mass spectra of the process identified Sn+ and SnO+ species as the dominant species sputtered from the target, but no SnO2+ species were detected. The dominant positive ions in argon plasma are Ar+ species. The only detected negative ions were OMINUS SIGN . Sputtered neutral tin related species were not detected. Iron related species were also not detectedbecause their concentration is below the detection limit. The concentration of iron dopant in the tin oxide coatings was controlled by the RF bias applied on the substrate holder while the discharge pressure also has some influence. The iron concentration was in the range from 0.9 at.% up to 19 at.% increasing with the substrate bias while the sheet resistivity decreases. The stoichiometry ratio of O/(Sn + Fe) in the coatings increased from 1.7 up to 2 in dependence on the substrate bia

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

JK - Corrosion and material surfaces

OECD FORD branch

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Project

<a href="/en/project/GA13-06989S" target="_blank" >GA13-06989S: Plasma-chemical modification of phyllosilicates for functional nanostructures</a><br>

Continuities

S - Specificky vyzkum na vysokych skolach

Publication year

2015

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Thin Solid Films

ISSN

0040-6090

e-ISSN

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Volume of the periodical

595

Issue of the periodical within the volume

NOV 30 2015

Country of publishing house

NL - THE KINGDOM OF THE NETHERLANDS

Number of pages

8

Pages from-to

200-208

UT code for WoS article

000365812400034

EID of the result in the Scopus database

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