Effects of sputtering power and pressure on properties of ZnO:Ga thin films prepared by oblique-angle deposition
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23210%2F11%3A43895749" target="_blank" >RIV/49777513:23210/11:43895749 - isvavai.cz</a>
Alternative codes found
RIV/49777513:23640/11:43895749
Result on the web
<a href="http://dx.doi.org/10.1016/j.tsf.2011.06.073" target="_blank" >http://dx.doi.org/10.1016/j.tsf.2011.06.073</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.tsf.2011.06.073" target="_blank" >10.1016/j.tsf.2011.06.073</a>
Alternative languages
Result language
angličtina
Original language name
Effects of sputtering power and pressure on properties of ZnO:Ga thin films prepared by oblique-angle deposition
Original language description
The effects of power and pressure on RF diode sputtering in oblique-angle (80°) deposition arrangement are presented. Oblique-angle sputtering of ZnO:Ga (GZO) thin films resulted in a tilted columnar crystalline structure and inclination of the c-axis byan angle of approximately 9° with respect to the substrate. This improved their structural, electrical and optical properties in comparison with films deposited perpendicularly to the substrate. GZO films sputtered by an RF power of 600W at room temperature of the substrate in Ar pressure 1.3Pa showed strong crystalline (002) texture, lowest electrical resistivity 3.4x10?3 omegacm, highest electron mobility 10cm2/Vs, high electron concentration 1.8x1020 cm?3 and good optical transparency up to 88%.
Czech name
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Czech description
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Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BM - Solid-state physics and magnetism
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>S - Specificky vyzkum na vysokych skolach
Others
Publication year
2011
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Thin Solid Films
ISSN
0040-6090
e-ISSN
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Volume of the periodical
520
Issue of the periodical within the volume
4
Country of publishing house
NL - THE KINGDOM OF THE NETHERLANDS
Number of pages
5
Pages from-to
1233-1237
UT code for WoS article
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EID of the result in the Scopus database
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