Pulsed dc magnetron discharges and their utilization in plasma surface engineering
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F03%3A00000010" target="_blank" >RIV/49777513:23520/03:00000010 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Pulsed dc magnetron discharges and their utilization in plasma surface engineering
Original language description
We shall report on time-resolved diagnostics performed by us and other authors in various types of pulsed dc magnetron discharges (unipolar high-power pulses with a repetition frequency up to 50 kHz and asymetric bipolar pulses with the frequency up to 350 kHz) with different geometries of magnetron targets (full targets or targets with holes) and different gas inlets.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
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Result continuities
Project
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Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2003
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
XXVI International Conference on Phenomena in Ionized Gases
ISBN
3-00-011689-3
ISSN
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e-ISSN
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Number of pages
2
Pages from-to
3-4
Publisher name
Local Organizing Committee
Place of publication
Greifswald
Event location
Greiswald
Event date
Jul 15, 2003
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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