On surface temperatures during high power pulsed magnetron sputtering using a hot target

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F11%3A43898419" target="_blank" >RIV/49777513:23520/11:43898419 - isvavai.cz</a>

Alternative codes found

RIV/49777513:23640/11:43898419

Result on the web

<a href="http://dx.doi.org/10.1016/j.surfcoat.2011.08.005" target="_blank" >http://dx.doi.org/10.1016/j.surfcoat.2011.08.005</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.surfcoat.2011.08.005" target="_blank" >10.1016/j.surfcoat.2011.08.005</a>

Result language

angličtina

Original language name

On surface temperatures during high power pulsed magnetron sputtering using a hot target

Original language description

A study of temperature of a magnetron target was performed for the case of high power pulsed magnetron sputtering (HPPMS) of titanium thin films, using a water-cooled target and a hot target. Temporal evolution and spatial distribution of surface temperature were investigated by an infrared camera for target diameter of 100 mm, pulse repetition frequencies of 1 and 10 kHz, and discharge average pulse currents of from 2.5 to 35 A. For the case of hot target, surface temperature of the erosion zone increased up to 1750 °C and melting occurred. Infrared camera measurements were precisely calibrated by a presence of solid state phase transformation in titanium. The target melting was analysed in detail. The dependencies of maximum temperature on average pulse current and on average target power density for the case of hot target revealed the existence of heat losses other than radiation at temperatures above 1500 °C, which correlates with higher erosion and deposition rates shown in anothe

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BL - Plasma physics and discharge through gases

OECD FORD branch

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Project

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Continuities

Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2011

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Surface and Coatings Technology

ISSN

0257-8972

e-ISSN

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Volume of the periodical

206

Issue of the periodical within the volume

6

Country of publishing house

CH - SWITZERLAND

Number of pages

5

Pages from-to

1155-1159

UT code for WoS article

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EID of the result in the Scopus database

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