Effect of ion bombardment on properties of hard reactively sputtered Ti(Fe)Nx films
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F04%3A00000267" target="_blank" >RIV/49777513:23520/04:00000267 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Effect of ion bombardment on properties of hard reactively sputtered Ti(Fe)Nx films
Original language description
This article reports on results of systematic investigation of properties of hard Ti(Fe)Nx films reactively sputtered using a d.c. unbalanced magnetron. The Ti(Fe)Nx films with a low Fe content were selected as typical single-phase material to investigat
Czech name
Vliv energie iontů na vlastnosti tvrdých, reaktivně naprašovaných Ti(Fe)Nx vrstev
Czech description
Byl zkoumán vliv energie, dodávané do Ti(Fe)Nx vrstev během jejich růstu dopadajícími ionty na jejich fyzikální a mechanické vlastnosti.
Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
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Result continuities
Project
<a href="/en/project/ME%20529" target="_blank" >ME 529: Nanostructured thin films</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2004
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Surface and Coatings Technology
ISSN
0257-8972
e-ISSN
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Volume of the periodical
177-178
Issue of the periodical within the volume
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Country of publishing house
NL - THE KINGDOM OF THE NETHERLANDS
Number of pages
10
Pages from-to
289-298
UT code for WoS article
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EID of the result in the Scopus database
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