Thermal conductivity of high-temperature Si-B-C-N thin films
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F11%3A43896514" target="_blank" >RIV/49777513:23520/11:43896514 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1016/j.surfcoat.2011.07.058" target="_blank" >http://dx.doi.org/10.1016/j.surfcoat.2011.07.058</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.surfcoat.2011.07.058" target="_blank" >10.1016/j.surfcoat.2011.07.058</a>
Alternative languages
Result language
angličtina
Original language name
Thermal conductivity of high-temperature Si-B-C-N thin films
Original language description
In this study, thermal transport was investigated for ceramic films with different silicon, boron, carbon, and nitrogen (Si-B-C-N) compositions. In order to investigate the effect of morphology on thermal barrier properties, the microstructure of these materials was varied from amorphous to nanocrystalline. Thermal conductivity trends of several ceramic thin films were characterized with a TDTR technique. Samples containing two different Si-B-C-N chemical compositions were created by reactive magnetronsputtering and then subjected to annealing at temperatures up to 1400 °C. The room temperature thermal conductivity of the samples prepared via a 50% argon/50% nitrogen gas mixture remained constant, while samples prepared via a 75% argon/25% nitrogen gas mixture exhibited an increase in the thermal conductivity. The experiments reveal which Si-B-C-N film composition remains stable in the amorphous state at high temperatures, thereby retaining lower thermal transport properties.
Czech name
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Czech description
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Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
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Result continuities
Project
<a href="/en/project/OC10045" target="_blank" >OC10045: Novel plasma sources for film deposition and surface modification</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2011
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Surface & Coatings Technology
ISSN
0257-8972
e-ISSN
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Volume of the periodical
206
Issue of the periodical within the volume
7
Country of publishing house
US - UNITED STATES
Number of pages
4
Pages from-to
2030-2033
UT code for WoS article
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EID of the result in the Scopus database
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