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Mechanical and tribological properties of Sn-Cu-O films prepared by reactive magnetron sputterting

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F14%3A43921471" target="_blank" >RIV/49777513:23520/14:43921471 - isvavai.cz</a>

  • Result on the web

    <a href="http://dx.doi.org/10.1116/1.4859275" target="_blank" >http://dx.doi.org/10.1116/1.4859275</a>

  • DOI - Digital Object Identifier

    <a href="http://dx.doi.org/10.1116/1.4859275" target="_blank" >10.1116/1.4859275</a>

Alternative languages

  • Result language

    angličtina

  • Original language name

    Mechanical and tribological properties of Sn-Cu-O films prepared by reactive magnetron sputterting

  • Original language description

    Tin-copper-oxide (Sn-Cu-O) thin films were deposited onto Si (100) substrates by reactive magnetron sputtering in an argon-oxygen atmosphere. The effect of the substrate temperature and the amount of Cu in the Sn-Cu-O films on its mechanical and tribological properties was investigated in detail. The most important result of the investigation reported is the finding that the knowledge of interrelationships between the mechanical and tribological properties of films makes it possible to optimize their tribological properties and to prepare Sn-Cu-O films with minimum values of the coefficient of friction and wear rate.

  • Czech name

  • Czech description

Classification

  • Type

    J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

  • CEP classification

    BL - Plasma physics and discharge through gases

  • OECD FORD branch

Result continuities

  • Project

    <a href="/en/project/GAP108%2F12%2F0393" target="_blank" >GAP108/12/0393: Hard nanocomposite coatings with enhanced toughness and unique properties</a><br>

  • Continuities

    P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Others

  • Publication year

    2014

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Name of the periodical

    Journal of Vacuum Science and Technology A

  • ISSN

    0734-2101

  • e-ISSN

  • Volume of the periodical

    32

  • Issue of the periodical within the volume

    2

  • Country of publishing house

    US - UNITED STATES

  • Number of pages

    6

  • Pages from-to

    021504-1-021504-6

  • UT code for WoS article

    000335964200045

  • EID of the result in the Scopus database