Reactive high-power impulse magnetron sputtering of ZrO2 films with gradient ZrOx interlayers on pretreated steel substrates

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F17%3A43931491" target="_blank" >RIV/49777513:23520/17:43931491 - isvavai.cz</a>

Result on the web

<a href="http://dx.doi.org/10.1116/1.4978037" target="_blank" >http://dx.doi.org/10.1116/1.4978037</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1116/1.4978037" target="_blank" >10.1116/1.4978037</a>

Result language

angličtina

Original language name

Reactive high-power impulse magnetron sputtering of ZrO2 films with gradient ZrOx interlayers on pretreated steel substrates

Original language description

High-power impulse magnetron sputtering with a pulsed O2 flow control was used for reactive depositions of densified stoichiometric ZrO2 films with gradient ZrOx interlayers onto floating Si and steel substrates at low substrate temperatures (less than 150 °C). The depositions were performed using a strongly unbalanced magnetron with a planar Zr target of 100 mm diameter in Ar+O2 gas mixtures at the total pressure close to 2 Pa. Two kinds of gradient ZrOx interlayers with different depth profiles of the stoichiometric coefficient x were deposited using the feed-back pulsed O2 flow control. Prior to deposition, a modification of the substrate surfaces was performed by high-power impulse magnetron sputtering of the Zr target in Ar gas at the same pressure of 2 Pa and a dc substrate bias from –965 V to –620 V in a target pulse and low substrate temperatures (less than 150 °C) for 10 min. It was shown that the pretreatment of the steel substrates is a necessary condition for good adhesion of the zirconium oxide (both pure ZrO2 and ZrO2+ZrOx interlayer) films and that the adhesion of the ZrO2 films is substantially higher when the gradient ZrOx interlayers are used. The densified stoichiometric ZrO2 films (refractive index of 2.21 and extinction coefficient of 0.0004 at the wavelength of 550 nm) deposited onto the gradient ZrOx interlayers exhibited a high hardness (15–16 GPa) and an enhanced resistance to cracking.

Czech name

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Czech description

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Type

J_imp - Article in a specialist periodical, which is included in the Web of Science database

CEP classification

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OECD FORD branch

20506 - Coating and films

Project

<a href="/en/project/GA14-03875S" target="_blank" >GA14-03875S: Nanostructured multifunctional coatings prepared using highly ionized pulsed plasmas</a><br>

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2017

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Journal of Vacuum Science and Technology A

ISSN

0734-2101

e-ISSN

—

Volume of the periodical

35

Issue of the periodical within the volume

3

Country of publishing house

US - UNITED STATES

Number of pages

9

Pages from-to

„031503-1“-„031503-9“

UT code for WoS article

000401122700025

EID of the result in the Scopus database

2-s2.0-85015620502