Analysis of optical properties of carbon films by spectroscopic ellipsometry

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F20%3A43958649" target="_blank" >RIV/49777513:23520/20:43958649 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Analysis of optical properties of carbon films by spectroscopic ellipsometry
Original language description
The aim of the project was analysis of optical properties of 11 carbon films (different preparation conditions, different substrates) deposited on a titanium interlayer. The properties were analyzed in the visible as well as in the infrared. The project is related to the activities of the industrial partner in the field of fuel cells, and specifically the interest in the properties of carbon films is motivated by the efforts to easily and quickly evaluate their thickness by measuring their reflectance. Measurements were performed by spectroscopic ellipsometry (change of light polarization after its reflection from a material). For each analyzed film, these raw data were used to obtain the dependencies of its refractive index and extinction coefficient on the wavelength. The results were independently crosschecked by comparing the reflectance predicted in this way with the reflectance measured by spectrophotometry. The dependence of the reflectance on the thickness was predicted as well, confirming the aforementioned possibility to use reflectometry in order to measure thickness.
Czech name
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Czech description
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Publication year
2020
Confidentiality
C - Předmět řešení projektu podléhá obchodnímu tajemství (§ 504 Občanského zákoníku), ale název projektu, cíle projektu a u ukončeného nebo zastaveného projektu zhodnocení výsledku řešení projektu (údaje P03, P04, P15, P19, P29, PN8) dodané do CEP, jsou upraveny tak, aby byly zveřejnitelné.

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