Analysis of refractive index, extinction coefficient and thickness of carbon films by spectroscopic ellipsometry

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F23%3A43970890" target="_blank" >RIV/49777513:23520/23:43970890 - isvavai.cz</a>

Result on the web

—

DOI - Digital Object Identifier

—

Result language

angličtina

Original language name

Analysis of refractive index, extinction coefficient and thickness of carbon films by spectroscopic ellipsometry

Original language description

The aim of the project was analysis of optical properties of 7 carbon films deposited on a titanium interlayer. The project is related to activities of the industrial partner in the field of hydrogen fuel cells. The properties were analyzed in the visible as well as in the infrared. Measurements were performed by spectroscopic ellipsometry (change of light polarization after its reflection from a material). For each analyzed film, these raw data were used to obtain the dependencies of its refractive index and extinction coefficient on the wavelength, its thickness and surface roughness. Complementary measurements were performed by spectrophotometry, whose results were used to confirm the correctness of measured properties.

Czech name

—

Czech description

—

Type

V_souhrn - Summary research report

CEP classification

—

OECD FORD branch

20501 - Materials engineering

Project

—

Continuities

N - Vyzkumna aktivita podporovana z neverejnych zdroju

Publication year

2023

Confidentiality

C - Předmět řešení projektu podléhá obchodnímu tajemství (§ 504 Občanského zákoníku), ale název projektu, cíle projektu a u ukončeného nebo zastaveného projektu zhodnocení výsledku řešení projektu (údaje P03, P04, P15, P19, P29, PN8) dodané do CEP, jsou upraveny tak, aby byly zveřejnitelné.

Number of pages

11

Place of publication

—

Publisher/client name

IHI Ionbond Netherlands b.v.

Version

—