Nanostructured CuWO4/WO3-x films prepared by reactive magnetron sputtering for hydrogen sensing
Result description
High-purity films consisting of copper tungstate (CuWO4) and sub-stoichiometric tungsten oxide (WO3-x) were prepared by reactive sputter deposition. An original two-step deposition process was applied for their synthesis. First, a tungsten oxide thin film was deposited by dc magnetron sputtering from a W target in an Ar + O2 gas mixture, afterward, rf sputtering of a Cu target in an Ar + O2 gas mixture was employed to form a discontinuous CuWO4 layer at the top. This results in a formation of nanostructured branched islands of the tungstate. Bilayers with various layer thicknesses were investigated for the sensitivity to hydrogen gas as a conductometric sensor. The sensitivity changes remarkably with the thicknesses of individual layers. The maximum sensitivity was observed for the films with a layer thickness ratio of 5 nm/20 nm. The response was enhanced more than eight times compared to a 20 nm-thick tungsten oxide alone film. An explanation based on the formation of nano-sized n-n junctions is provided. In addition, a microscopy study of the bilayer growth is presented in detail.
Keywords
Reactive magnetron sputteringHydrogen gas sensorCopper TungstateTungsten oxide
The result's identifiers
Result code in IS VaVaI
Result on the web
DOI - Digital Object Identifier
Alternative languages
Result language
angličtina
Original language name
Nanostructured CuWO4/WO3-x films prepared by reactive magnetron sputtering for hydrogen sensing
Original language description
High-purity films consisting of copper tungstate (CuWO4) and sub-stoichiometric tungsten oxide (WO3-x) were prepared by reactive sputter deposition. An original two-step deposition process was applied for their synthesis. First, a tungsten oxide thin film was deposited by dc magnetron sputtering from a W target in an Ar + O2 gas mixture, afterward, rf sputtering of a Cu target in an Ar + O2 gas mixture was employed to form a discontinuous CuWO4 layer at the top. This results in a formation of nanostructured branched islands of the tungstate. Bilayers with various layer thicknesses were investigated for the sensitivity to hydrogen gas as a conductometric sensor. The sensitivity changes remarkably with the thicknesses of individual layers. The maximum sensitivity was observed for the films with a layer thickness ratio of 5 nm/20 nm. The response was enhanced more than eight times compared to a 20 nm-thick tungsten oxide alone film. An explanation based on the formation of nano-sized n-n junctions is provided. In addition, a microscopy study of the bilayer growth is presented in detail.
Czech name
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Czech description
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Classification
Type
Jimp - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
20506 - Coating and films
Result continuities
Project
GA19-13174S: Advanced hydrogen-gas sensing nanomaterials with a tailored architecture
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2020
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
INTERNATIONAL JOURNAL OF HYDROGEN ENERGY
ISSN
0360-3199
e-ISSN
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Volume of the periodical
45
Issue of the periodical within the volume
35
Country of publishing house
GB - UNITED KINGDOM
Number of pages
9
Pages from-to
18066-18074
UT code for WoS article
000546826200089
EID of the result in the Scopus database
2-s2.0-85085604614
Basic information
Result type
Jimp - Article in a specialist periodical, which is included in the Web of Science database
OECD FORD
Coating and films
Year of implementation
2020