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Reactive HiPIMS deposition of Al-oxide thin films using W-alloyed Al targets

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F21%3A43962206" target="_blank" >RIV/49777513:23520/21:43962206 - isvavai.cz</a>

  • Result on the web

    <a href="https://doi.org/10.1016/j.surfcoat.2021.127467" target="_blank" >https://doi.org/10.1016/j.surfcoat.2021.127467</a>

  • DOI - Digital Object Identifier

    <a href="http://dx.doi.org/10.1016/j.surfcoat.2021.127467" target="_blank" >10.1016/j.surfcoat.2021.127467</a>

Alternative languages

  • Result language

    angličtina

  • Original language name

    Reactive HiPIMS deposition of Al-oxide thin films using W-alloyed Al targets

  • Original language description

    We investigated in detail the influence of 2 at.% tungsten in the Al-target on the process stability and phase formation during reactive DC magnetron sputtering as well as high power impulse magnetron sputtering (HiPIMS) of Al2O3-based coatings. The small addition of W to the Al target allows to increase the oxygen partial pressure by more than 200% while maintaining a stable deposition process. Ion mass spectroscopy measurements yield a promising high fraction of oxygen ions, when operating the W-containing target in the metal-to-poisoned transition mode. Detailed electron microscopy investigations show the presence of metallic phase fractions for higher duty cycles (7.5%). Decreasing the duty cycle to 3.75% leads to amorphous coatings when operating the Al-target at the highest oxygen partial pressure in metallic mode.

  • Czech name

  • Czech description

Classification

  • Type

    J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database

  • CEP classification

  • OECD FORD branch

    20506 - Coating and films

Result continuities

  • Project

    <a href="/en/project/EF17_048%2F0007267" target="_blank" >EF17_048/0007267: Research and Development of Intelligent Components of Advanced Technologies for the Pilsen Metropolitan Area (InteCom)</a><br>

  • Continuities

    P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Others

  • Publication year

    2021

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Name of the periodical

    Surface and Coatings Technology

  • ISSN

    0257-8972

  • e-ISSN

  • Volume of the periodical

    422

  • Issue of the periodical within the volume

    25 SEP 2021

  • Country of publishing house

    CH - SWITZERLAND

  • Number of pages

    10

  • Pages from-to

    "127467-1"-"127467-10"

  • UT code for WoS article

    000685607200028

  • EID of the result in the Scopus database

    2-s2.0-85110752168