Reactive HiPIMS deposition of Al-oxide thin films using W-alloyed Al targets
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F21%3A43962206" target="_blank" >RIV/49777513:23520/21:43962206 - isvavai.cz</a>
Result on the web
<a href="https://doi.org/10.1016/j.surfcoat.2021.127467" target="_blank" >https://doi.org/10.1016/j.surfcoat.2021.127467</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.surfcoat.2021.127467" target="_blank" >10.1016/j.surfcoat.2021.127467</a>
Alternative languages
Result language
angličtina
Original language name
Reactive HiPIMS deposition of Al-oxide thin films using W-alloyed Al targets
Original language description
We investigated in detail the influence of 2 at.% tungsten in the Al-target on the process stability and phase formation during reactive DC magnetron sputtering as well as high power impulse magnetron sputtering (HiPIMS) of Al2O3-based coatings. The small addition of W to the Al target allows to increase the oxygen partial pressure by more than 200% while maintaining a stable deposition process. Ion mass spectroscopy measurements yield a promising high fraction of oxygen ions, when operating the W-containing target in the metal-to-poisoned transition mode. Detailed electron microscopy investigations show the presence of metallic phase fractions for higher duty cycles (7.5%). Decreasing the duty cycle to 3.75% leads to amorphous coatings when operating the Al-target at the highest oxygen partial pressure in metallic mode.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
20506 - Coating and films
Result continuities
Project
<a href="/en/project/EF17_048%2F0007267" target="_blank" >EF17_048/0007267: Research and Development of Intelligent Components of Advanced Technologies for the Pilsen Metropolitan Area (InteCom)</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2021
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Surface and Coatings Technology
ISSN
0257-8972
e-ISSN
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Volume of the periodical
422
Issue of the periodical within the volume
25 SEP 2021
Country of publishing house
CH - SWITZERLAND
Number of pages
10
Pages from-to
"127467-1"-"127467-10"
UT code for WoS article
000685607200028
EID of the result in the Scopus database
2-s2.0-85110752168