Time-averaged and time-resolved ion fluxes related to reactive HiPIMS deposition of Ti–Al–N films

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F21%3A43962326" target="_blank" >RIV/49777513:23520/21:43962326 - isvavai.cz</a>
Result on the web
<a href="https://doi.org/10.1016/j.surfcoat.2021.127638" target="_blank" >https://doi.org/10.1016/j.surfcoat.2021.127638</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.surfcoat.2021.127638" target="_blank" >10.1016/j.surfcoat.2021.127638</a>

Result language
angličtina
Original language name
Time-averaged and time-resolved ion fluxes related to reactive HiPIMS deposition of Ti–Al–N films
Original language description
Time-averaged and time-resolved ion fluxes during reactive HiPIMS deposition of Ti–Al–N thin films are thoroughly investigated for the usage of Ti–Al composite targets. Ion mass spectroscopy analysis revealed, that increasing Al content in the target material or reducing the N2 flow-rate ratio leads to a proportional increase of the Al+-ion count fraction. The deposition conditions allowed for the growth of cubic Ti–Al–N coatings exhibiting high indentation hardness of up to ~36 GPa at a low compressive stress level.
Czech name
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Czech description
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Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
20506 - Coating and films

Project
<a href="/en/project/LO1506" target="_blank" >LO1506: Sustainability support of the centre NTIS - New Technologies for the Information Society</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2021
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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