On density distribution of Ti atom and ion ground states near the target in HiPIMS discharge using cavity ring-down spectroscopy and laser induced fluorescence
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F22%3A43965273" target="_blank" >RIV/49777513:23520/22:43965273 - isvavai.cz</a>
Result on the web
<a href="http://doi.org/10.1088/1361-6595/ac6d0b" target="_blank" >http://doi.org/10.1088/1361-6595/ac6d0b</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1088/1361-6595/ac6d0b" target="_blank" >10.1088/1361-6595/ac6d0b</a>
Alternative languages
Result language
angličtina
Original language name
On density distribution of Ti atom and ion ground states near the target in HiPIMS discharge using cavity ring-down spectroscopy and laser induced fluorescence
Original language description
Cavity ring-down spectroscopy combined with laser induced fluorescence was applied during a high-power impulse magnetron sputtering of Ti target to determine the time evolutions and spatial distributions of Ti atom and ion densities of levels belonging to the ground state multiplets (GSM) near the sputtered target. From these densities, an estimate of the time evolution and spatial distribution of the ionization degree near the target was calculated. It was found that the densities (number of particles per unit volume) of levels in GSM of Ti atom and ion increases with their level energies and the highest levels in GSMs show an inversion in their populations (the density of level divided by its statistical weight) during a voltage pulse. The population inversion (a higher population of levels with a higher energy than those with lower ones) is distinct for the highest level in GSM of Ti+ ion and it persists even at 40 µs after the voltage pulse end. The sum of ground state level densities reaches values up to 8.3 × 10^11 1/cm^3 for Ti+ ions above the target racetrack and up to 4.8 × 10^11 1/cm^3 for Ti atoms above the target center for the regime with the peak power density of 498 W/cm^2. A frequent ionization of Ti atoms above the target racetrack is manifested by distinct drops in the Ti atom spatial distribution. This leads to a very high ionization degree up to 94% at the racetrack position and the ionization degree stays also high 40 µs after the voltage pulse termination.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10305 - Fluids and plasma physics (including surface physics)
Result continuities
Project
<a href="/en/project/GA19-14011S" target="_blank" >GA19-14011S: Design of novel functional materials, and pathways for their reactive magnetron sputtering, using advanced computer simulations</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2022
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
PLASMA SOURCES SCIENCE & TECHNOLOGY
ISSN
0963-0252
e-ISSN
1361-6595
Volume of the periodical
31
Issue of the periodical within the volume
5
Country of publishing house
GB - UNITED KINGDOM
Number of pages
7
Pages from-to
"05LT04-1"-"05LT04-7"
UT code for WoS article
000798964000001
EID of the result in the Scopus database
2-s2.0-85131099865