Rectangular magnetron with full target erosion
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F99%3A00039171" target="_blank" >RIV/49777513:23520/99:00039171 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Rectangular magnetron with full target erosion
Original language description
The article reports on the operation of a rectangular magnetron with three and four closed discharges simultaneously formed on the surface of sputtered target. The closed discharges, elliptically shaped with the longer axis perpendicular to the long sideof the rectangular magnetron, are formed using magnetic circuits placed behind the sputtered target. By moving these magnetic circuits along the long axis of a rectangular target, it is possible to achieve almost full target erosion and therefore significantly increase the usage lifetime on the target. This principle can be used for rectangular magnetrons with arbitrary length of the target. The longer the target, the greater the number of closed discharges that are required. Experimentally, it was found that neighboring closed discharges can interact which may significantly modify the sputtering characteristics of the magnetron cathode. This interaction is described and the physical requirements to avoid its occurrence are given.
Czech name
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Czech description
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Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
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Result continuities
Project
<a href="/en/project/GV106%2F96%2FK245" target="_blank" >GV106/96/K245: Hard and superhard coatings prepared by unconventional plasma processes</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
1999
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Journal of Vacuum Science and Technology
ISSN
07342101
e-ISSN
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Volume of the periodical
Vol.^A17
Issue of the periodical within the volume
č.^2
Country of publishing house
US - UNITED STATES
Number of pages
9
Pages from-to
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UT code for WoS article
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EID of the result in the Scopus database
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