Pressure dependence of Ar-2(+), ArTi+, and Ti-2(+) dimer formation in a magnetron sputtering discharge

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F60076658%3A12310%2F17%3A43895657" target="_blank" >RIV/60076658:12310/17:43895657 - isvavai.cz</a>

Alternative codes found

RIV/68378271:_____/17:00486976

Result on the web

<a href="http://iopscience.iop.org/article/10.1088/1361-6463/aa8b9a/meta" target="_blank" >http://iopscience.iop.org/article/10.1088/1361-6463/aa8b9a/meta</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1088/1361-6463/aa8b9a" target="_blank" >10.1088/1361-6463/aa8b9a</a>

Result language

angličtina

Original language name

Pressure dependence of Ar-2(+), ArTi+, and Ti-2(+) dimer formation in a magnetron sputtering discharge

Original language description

Formation of Ar+ and Ti+ monomers and of Ar-2(+), ArTi+, and Ti-2(+) dimer ions in a magnetron sputtering discharge with a Ti cathode and at argon gas pressures of 0.3-2.1 Pa was investigated by means of energy-resolved mass spectrometry. An unbalanced 2 inch magnetron operated in direct current mode with a power of 150 W (typical operation voltage -365 V) was employed. Energy spectra of Ar+ and Ti+ ions show distinct features which are related to the specific formation processes taking place at the Ti cathode or resulting from gas phase reactions. Formation of Ar-2(+), ArTi+, and Ti-2(+) dimer ions show pronounced pressure dependencies which can be attributed to distinct formation and loss processes. Ti-2(+) ions originate from direct sputtering of Ti-2 dimers and the subsequent ionization in the plasma region above the cathode.

Czech name

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Czech description

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Type

J_imp - Article in a specialist periodical, which is included in the Web of Science database

CEP classification

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OECD FORD branch

10305 - Fluids and plasma physics (including surface physics)

Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2017

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Journal of Physics D: Applied Physics

ISSN

0022-3727

e-ISSN

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Volume of the periodical

50

Issue of the periodical within the volume

44

Country of publishing house

GB - UNITED KINGDOM

Number of pages

8

Pages from-to

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UT code for WoS article

000415635800003

EID of the result in the Scopus database

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