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Pressure dependence of singly and doubly charged ion formation in a HiPIMS discharge

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F19%3A00505018" target="_blank" >RIV/68378271:_____/19:00505018 - isvavai.cz</a>

  • Alternative codes found

    RIV/60076658:12310/19:43899148

  • Result on the web

    <a href="https://doi.org/10.1063/1.5055356" target="_blank" >https://doi.org/10.1063/1.5055356</a>

  • DOI - Digital Object Identifier

    <a href="http://dx.doi.org/10.1063/1.5055356" target="_blank" >10.1063/1.5055356</a>

Alternative languages

  • Result language

    angličtina

  • Original language name

    Pressure dependence of singly and doubly charged ion formation in a HiPIMS discharge

  • Original language description

    Generation of singly charged Ar+ and Ti+, doubly charged Ar2+ and Ti2+, and of Ar2+ and Ti2+ dimer ions in a high power impulse magnetron sputtering (HiPIMS) discharge with a Ti cathode was investigated. Energy-resolved mass spectrometry was employed. The argon gas pressures varied between 0.5 and 2.0 Pa. Energy spectra of monomer ions are composed of low- and high-energy components. The energetic position of the high-energy component is approximately twice as large for doubly charged ions compared to singly charged ions. Intensities of Ar2+ and Ti2+ dimer ions are considerably smaller during HiPIMS compared to dc magnetron sputtering. compared to dc magnetron sputtering. Published under license by AIP Publishing.

  • Czech name

  • Czech description

Classification

  • Type

    J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database

  • CEP classification

  • OECD FORD branch

    10305 - Fluids and plasma physics (including surface physics)

Result continuities

  • Project

    Result was created during the realization of more than one project. More information in the Projects tab.

  • Continuities

    P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Others

  • Publication year

    2019

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Name of the periodical

    Journal of Applied Physics

  • ISSN

    0021-8979

  • e-ISSN

  • Volume of the periodical

    125

  • Issue of the periodical within the volume

    1

  • Country of publishing house

    US - UNITED STATES

  • Number of pages

    7

  • Pages from-to

    1-7

  • UT code for WoS article

    000455350200006

  • EID of the result in the Scopus database

    2-s2.0-85059577955