Pressure dependence of singly and doubly charged ion formation in a HiPIMS discharge

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F19%3A00505018" target="_blank" >RIV/68378271:_____/19:00505018 - isvavai.cz</a>
Alternative codes found
RIV/60076658:12310/19:43899148
Result on the web
<a href="https://doi.org/10.1063/1.5055356" target="_blank" >https://doi.org/10.1063/1.5055356</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1063/1.5055356" target="_blank" >10.1063/1.5055356</a>

Result language
angličtina
Original language name
Pressure dependence of singly and doubly charged ion formation in a HiPIMS discharge
Original language description
Generation of singly charged Ar+ and Ti+, doubly charged Ar2+ and Ti2+, and of Ar2+ and Ti2+ dimer ions in a high power impulse magnetron sputtering (HiPIMS) discharge with a Ti cathode was investigated. Energy-resolved mass spectrometry was employed. The argon gas pressures varied between 0.5 and 2.0 Pa. Energy spectra of monomer ions are composed of low- and high-energy components. The energetic position of the high-energy component is approximately twice as large for doubly charged ions compared to singly charged ions. Intensities of Ar2+ and Ti2+ dimer ions are considerably smaller during HiPIMS compared to dc magnetron sputtering. compared to dc magnetron sputtering. Published under license by AIP Publishing.
Czech name
—
Czech description
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Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
—
OECD FORD branch
10305 - Fluids and plasma physics (including surface physics)

Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2019
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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