Possibilities of the Application of the Warm Probe combined with Fast Measurement under Conditions of the Plasma - Polymerisation Processes.

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F60076658%3A_____%2F02%3A00004031" target="_blank" >RIV/60076658:_____/02:00004031 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Possibilities of the Application of the Warm Probe combined with Fast Measurement under Conditions of the Plasma - Polymerisation Processes.

Original language description

In recent years the plasma-aided deposition processes have received an increasing attention. One of them was the plasma polymerisation. This process takes place in plasma of an electrical discharge operated in a mixture of an inert gas (usually argon) and an organic gas or vapour at low pressure. Resulting deposits (called plasma polymers) differ substantially from the conventional polymers; they posses, however, the unique properties. In spite of these successes certain problems remain, for example inreproducibility and ageing of these films mainly because of the lack of the proper in situ plasma diagnostics. The chief diagnostics methods that are used are the optical emission spectroscopy, corpuscular diagnostics (mass spectrometry) and Langmuir probes. For the Langmuir probe plasma diagnostics was especially developed high - speed measuring system controlled by personal computer. The high-speed measuring system gives improvements of the probe diagnostics of the plasma in the specif

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BL - Plasma physics and discharge through gases

OECD FORD branch

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Project

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Continuities

Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2002

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Czech. J. Physics

ISSN

0011-4626

e-ISSN

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Volume of the periodical

x

Issue of the periodical within the volume

52

Country of publishing house

CZ - CZECH REPUBLIC

Number of pages

6

Pages from-to

794-799

UT code for WoS article

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EID of the result in the Scopus database

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