Surface characterisation of tin oxide thin films for gas sensors prepared by plasma oxidation.

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61389005%3A_____%2F03%3A49033190" target="_blank" >RIV/61389005:_____/03:49033190 - isvavai.cz</a>

Result on the web

—

DOI - Digital Object Identifier

—

Result language

angličtina

Original language name

Surface characterisation of tin oxide thin films for gas sensors prepared by plasma oxidation.

Original language description

We presented the combined study of plasma deposited tin oxide films by AFM and RBS. The stoichiometry of prepared layers and trace elements, impurities were evaluated from RBS spectra and the topography was deduced from AFM measurement. We observed the dependence between the composition of the film prepared, the roughness and plasma deposition parameters.

Czech name

—

Czech description

—

Type

D - Article in proceedings

CEP classification

BM - Solid-state physics and magnetism

OECD FORD branch

—

Project

—

Continuities

Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2003

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection

Proceedings of Symposium on Application of Plasma Processes.

ISBN

80-8040-195-0

ISSN

—

e-ISSN

—

Number of pages

2

Pages from-to

144-145

Publisher name

N/A

Place of publication

N/A

Event location

Liptovský Mikuláš [SK]

Event date

Jan 13, 2003

Type of event by nationality

EUR - Evropská akce

UT code for WoS article

—