Robust Local Thickness Estimation of Sub-Micrometer Specimen by 4D-STEM
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61389013%3A_____%2F23%3A00579321" target="_blank" >RIV/61389013:_____/23:00579321 - isvavai.cz</a>
Alternative codes found
RIV/68081731:_____/23:00579321
Result on the web
<a href="https://onlinelibrary.wiley.com/doi/10.1002/smtd.202300258" target="_blank" >https://onlinelibrary.wiley.com/doi/10.1002/smtd.202300258</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1002/smtd.202300258" target="_blank" >10.1002/smtd.202300258</a>
Alternative languages
Result language
angličtina
Original language name
Robust Local Thickness Estimation of Sub-Micrometer Specimen by 4D-STEM
Original language description
A quantitative four-dimensional scanning transmission electron microscopy (4D-STEM) imaging technique (q4STEM) for local thickness estimation across amorphous specimen such as obtained by focused ion beam (FIB)-milling of lamellae for (cryo-)TEM analysis is presented. This study is based on measuring spatially resolved diffraction patterns to obtain the angular distribution of electron scattering, or the ratio of integrated virtual dark and bright field STEM signals, and their quantitative evaluation using Monte Carlo simulations. The method is independent of signal intensity calibrations and only requires knowledge of the detector geometry, which is invariant for a given instrument. This study demonstrates that the method yields robust thickness estimates for sub-micrometer amorphous specimen using both direct detection and light conversion 2D-STEM detectors in a coincident FIB-SEM and a conventional SEM. Due to its facile implementation and minimal dose reauirements, it is anticipated that this method will find applications for in situ thickness monitoring during lamella fabrication of beam-sensitive materials.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10301 - Atomic, molecular and chemical physics (physics of atoms and molecules including collision, interaction with radiation, magnetic resonances, Mössbauer effect)
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2023
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Small Methods
ISSN
2366-9608
e-ISSN
2366-9608
Volume of the periodical
7
Issue of the periodical within the volume
9
Country of publishing house
US - UNITED STATES
Number of pages
11
Pages from-to
2300258
UT code for WoS article
000997748800001
EID of the result in the Scopus database
2-s2.0-85160667652