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Robust Local Thickness Estimation of Sub-Micrometer Specimen by 4D-STEM

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61389013%3A_____%2F23%3A00579321" target="_blank" >RIV/61389013:_____/23:00579321 - isvavai.cz</a>

  • Alternative codes found

    RIV/68081731:_____/23:00579321

  • Result on the web

    <a href="https://onlinelibrary.wiley.com/doi/10.1002/smtd.202300258" target="_blank" >https://onlinelibrary.wiley.com/doi/10.1002/smtd.202300258</a>

  • DOI - Digital Object Identifier

    <a href="http://dx.doi.org/10.1002/smtd.202300258" target="_blank" >10.1002/smtd.202300258</a>

Alternative languages

  • Result language

    angličtina

  • Original language name

    Robust Local Thickness Estimation of Sub-Micrometer Specimen by 4D-STEM

  • Original language description

    A quantitative four-dimensional scanning transmission electron microscopy (4D-STEM) imaging technique (q4STEM) for local thickness estimation across amorphous specimen such as obtained by focused ion beam (FIB)-milling of lamellae for (cryo-)TEM analysis is presented. This study is based on measuring spatially resolved diffraction patterns to obtain the angular distribution of electron scattering, or the ratio of integrated virtual dark and bright field STEM signals, and their quantitative evaluation using Monte Carlo simulations. The method is independent of signal intensity calibrations and only requires knowledge of the detector geometry, which is invariant for a given instrument. This study demonstrates that the method yields robust thickness estimates for sub-micrometer amorphous specimen using both direct detection and light conversion 2D-STEM detectors in a coincident FIB-SEM and a conventional SEM. Due to its facile implementation and minimal dose reauirements, it is anticipated that this method will find applications for in situ thickness monitoring during lamella fabrication of beam-sensitive materials.

  • Czech name

  • Czech description

Classification

  • Type

    J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database

  • CEP classification

  • OECD FORD branch

    10301 - Atomic, molecular and chemical physics (physics of atoms and molecules including collision, interaction with radiation, magnetic resonances, Mössbauer effect)

Result continuities

  • Project

    Result was created during the realization of more than one project. More information in the Projects tab.

  • Continuities

    P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Others

  • Publication year

    2023

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Name of the periodical

    Small Methods

  • ISSN

    2366-9608

  • e-ISSN

    2366-9608

  • Volume of the periodical

    7

  • Issue of the periodical within the volume

    9

  • Country of publishing house

    US - UNITED STATES

  • Number of pages

    11

  • Pages from-to

    2300258

  • UT code for WoS article

    000997748800001

  • EID of the result in the Scopus database

    2-s2.0-85160667652