Controlled strong excitation of silicon as a step towards processing materials at sub-nanometer precision
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61389021%3A_____%2F19%3A00580611" target="_blank" >RIV/61389021:_____/19:00580611 - isvavai.cz</a>
Alternative codes found
RIV/68378271:_____/19:00518029
Result on the web
<a href="https://www.nature.com/articles/s42005-019-0253-2" target="_blank" >https://www.nature.com/articles/s42005-019-0253-2</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1038/s42005-019-0253-2" target="_blank" >10.1038/s42005-019-0253-2</a>
Alternative languages
Result language
angličtina
Original language name
Controlled strong excitation of silicon as a step towards processing materials at sub-nanometer precision
Original language description
Interaction of a solid material with focused, intense pulses of high-energy photons or other particles (such as electrons and ions) creates a strong electronic excitation state within an ultra-short time and on ultra-small spatial scales. This offers the possibility to control the response of a material on a spatial scale less than a nanometer-crucial for the next generation of nano-devices. Here we create craters on the surface of a silicon substrate by focusing single femtosecond extreme ultraviolet pulse from the SACLA free-electron laser. We investigate the resulting surface modification in the vicinity of damage thresholds, establishing a connection to microscopic theoretical approaches, and, with their help, illustrating physical mechanisms for damage creation. The cooling during ablation by means of rapid electron and energy transport can suppress undesired hydrodynamical motions, allowing the silicon material to be directly processed with a precision reaching the observable limitation of an atomic force microscope.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10306 - Optics (including laser optics and quantum optics)
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2019
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
COMMUNICATIONS PHYSICS
ISSN
2399-3650
e-ISSN
2399-3650
Volume of the periodical
2
Issue of the periodical within the volume
1
Country of publishing house
US - UNITED STATES
Number of pages
9
Pages from-to
150
UT code for WoS article
000501179100001
EID of the result in the Scopus database
2-s2.0-85075765460