Controlled strong excitation of silicon as a step towards processing materials at sub-nanometer precision

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F19%3A00518029" target="_blank" >RIV/68378271:_____/19:00518029 - isvavai.cz</a>

Alternative codes found

RIV/61389021:_____/19:00580611

Result on the web

<a href="http://hdl.handle.net/11104/0303232" target="_blank" >http://hdl.handle.net/11104/0303232</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1038/s42005-019-0253-2" target="_blank" >10.1038/s42005-019-0253-2</a>

Result language

angličtina

Original language name

Controlled strong excitation of silicon as a step towards processing materials at sub-nanometer precision

Original language description

Interaction of a solid material with focused, intense pulses of high-energy photons or other particles (such as electrons and ions) creates a strong electronic excitation state within an ultra-short time and on ultra-small spatial scales. This offers possibility to control a response of the material on a spatial scale less than a nanometer—crucial for the next generation of nano-devices. Here we create craters on the surface of a silicon substrate by focusing single femtosecond extreme ultraviolet pulse from the SACLA free-electron laser. We investigate the resulting surface modification in the vicinity of damage thresholds, establishing a connection to microscopic theoretical approaches, and, with their help, illustrating physical mechanisms for damage creation. The cooling during ablation by means of rapid electron and energy transport can suppress undesired hydrodynamical motions, allowing the silicon material to be directly processed with a precision.n

Czech name

—

Czech description

—

Type

J_imp - Article in a specialist periodical, which is included in the Web of Science database

CEP classification

—

OECD FORD branch

10306 - Optics (including laser optics and quantum optics)

Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2019

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

COMMUNICATIONS PHYSICS

ISSN

2399-3650

e-ISSN

—

Volume of the periodical

2

Issue of the periodical within the volume

1

Country of publishing house

GB - UNITED KINGDOM

Number of pages

9

Pages from-to

1-9

UT code for WoS article

000501179100001

EID of the result in the Scopus database

2-s2.0-85075765460