Phase retrieval from the spectral interference signal used to measure thickness of SiO2 thin film on silicon wafer
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61989100%3A27350%2F07%3A00016552" target="_blank" >RIV/61989100:27350/07:00016552 - isvavai.cz</a>
Result on the web
—
DOI - Digital Object Identifier
—
Alternative languages
Result language
angličtina
Original language name
Phase retrieval from the spectral interference signal used to measure thickness of SiO2 thin film on silicon wafer
Original language description
A new method of phase retrieval from the spectral interference signal is presented, which is based on the use of a windowed Fourier transform in the wavelength domain. The phase retrieved by the method is utilized for measuring the thickness of SiO2 thinfilm on a silicon wafer. The numerical simulations are performed to demonstrate high precision of the phase retrieval. The feasibility of the method is confirmed in processing experimental data from a slightly dispersive Michelson interferometer with one of the mirrors replaced by SiO2 thin film on the silicon wafer. We determine the thin-film thickness for four samples provided that the optical constants for all the materials involved in the experiment are known. We confirm very good agreement with the previous results obtained by the fitting of the recorded channelled spectra to the theoretical ones.
Czech name
Obnovení fáze ze spektrlního interferenčního signálu použitého pro měření loušťky tenké vrstvy SiO2 na křemíkovém waferu
Czech description
Obnovení fáze ze spektrlního interferenčního signálu použitého pro měření loušťky tenké vrstvy SiO2 na křemíkovém waferu
Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BH - Optics, masers and lasers
OECD FORD branch
—
Result continuities
Project
<a href="/en/project/GA202%2F06%2F0531" target="_blank" >GA202/06/0531: Reflection and waveguiding effects in magnetic nanostructures</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2007
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
APPLIED PHYSICS B-LASERS AND OPTICS
ISSN
0946-2171
e-ISSN
—
Volume of the periodical
88
Issue of the periodical within the volume
3
Country of publishing house
US - UNITED STATES
Number of pages
7
Pages from-to
397-4037
UT code for WoS article
—
EID of the result in the Scopus database
—