White-light spectral interferometric technique used to measure thickness of thin films

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61989100%3A27350%2F07%3A00016596" target="_blank" >RIV/61989100:27350/07:00016596 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

White-light spectral interferometric technique used to measure thickness of thin films

Original language description

We present a white-light spectral interferometric technique for measuring the thickness of a thin film on a substrate. First, the channeled spectrum is expressed analytically for a setup of a slightly dispersive Michelson interferometer with a cube beamsplitter of given effective thickness and a fiber-optic spectrometer of a Gaussian response function when one of the interferometer mirrors is replaced by the thin film on the substrate. Then we model the wavelength dependences of the reflectance, the visibility of the spectral interference fringes, the phase change on reflection and the so-called nonlinear phase function, respectively, for a SiO2 thin film on a silicon wafer. In the modeling, the optical constants are known and multiple reflection within the thin-film structure is taken into account. Second, we perform interferometric experiments with a SiO thin film on aluminium and the SiO2 thin film on the silicon wafer. Channeled spectra are recorded for determining the thin-film t

Czech name

Metody spektrální interferometrie v bílem světle využívané k měření tloušťky tenkých vrstev

Czech description

Metody spektrální interferometrie v bílem světle využívané k měření tloušťky tenkých vrstev

Type

D - Article in proceedings

CEP classification

BH - Optics, masers and lasers

OECD FORD branch

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Project

<a href="/en/project/GA202%2F06%2F0531" target="_blank" >GA202/06/0531: Reflection and waveguiding effects in magnetic nanostructures</a><br>

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2007

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection

Proceedings of SPIE

ISBN

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ISSN

0277-786X

e-ISSN

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Number of pages

9

Pages from-to

661605-661605

Publisher name

SPIE-The International Society for Optical Engineering

Place of publication

Bellingham

Event location

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Event date

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Type of event by nationality

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UT code for WoS article

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