Dispersive white-light spectral interferometry used to measure thickness of a thin film on a substrate

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61989100%3A27350%2F07%3A00016600" target="_blank" >RIV/61989100:27350/07:00016600 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Dispersive white-light spectral interferometry used to measure thickness of a thin film on a substrate

Original language description

We present a white-light spectral interferometric technique for measuring the thickness of a thin film on a substrate. First, the spectral interferogram is expressed analytically for a setup of a slightly dispersive Michelson interferometer with a cube beam splitter and a fiber-optic spectrometer of a Gaussian response function when one of the interferometer mirrors is replaced by the thin film on the substrate. We reveal that the visibility of the spectral interference fringes is dependent on the reflectance of the thin-film structure and that the phase change on reflection from the structure is inscribed in the phase of the spectral interference fringes. We model the wavelength dependences of the reflectance and of the so-called nonlinear phase function for SiO2 thin film on a silicon wafer of known optical constants taking into account multiple reflection within the thin-film structure. Second, we perform experiments with the SiO2 thin film on the silicon wafer and record the spectr

Czech name

Disperzní interferometrie v bílém světle využitá pro měření tloušťky tenké vrstvy na substrátu

Czech description

Disperzní interferometrie v bílém světle využitá pro měření tloušťky tenké vrstvy na substrátu

Type

D - Article in proceedings

CEP classification

BH - Optics, masers and lasers

OECD FORD branch

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Project

<a href="/en/project/GA202%2F06%2F0531" target="_blank" >GA202/06/0531: Reflection and waveguiding effects in magnetic nanostructures</a><br>

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2007

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection

Proceedings of SPIE

ISBN

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ISSN

0277-786X

e-ISSN

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Number of pages

9

Pages from-to

66090-66090

Publisher name

SPIE-The International Society for Optical Engineering

Place of publication

Bellingham

Event location

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Event date

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Type of event by nationality

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UT code for WoS article

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