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On the effect of oxygen flooding on the detection of noble gas ions in a SIMS instrument

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F67985882%3A_____%2F10%3A00349994" target="_blank" >RIV/67985882:_____/10:00349994 - isvavai.cz</a>

  • Result on the web

  • DOI - Digital Object Identifier

Alternative languages

  • Result language

    angličtina

  • Original language name

    On the effect of oxygen flooding on the detection of noble gas ions in a SIMS instrument

  • Original language description

    We have investigated the report by Desgranges and Pasquet (2004) [1] that O2 gas flooding in a secondary ion mass spectrometer could enhance by a factor of about 5 the Xe+ ion yield for a Xe implant in UO2 sputtered by O2+ primary ions. For a Xe implantin Si sputtered by O2+ primary ions and for Xe+ sputtering of silicon in steady state, O2 gas flooding reduced the Xe+ ion signal by a factor of about 2, presumably due to loss of Xe+ by resonant charge exchange with gas-phase oxygen molecules. The yieldof a Kr co-implant in Si was unaffected by oxygen flooding. However, we demonstrate that for steady-state Ar+ sputtering of uranium, the Ar+ ion yield can be increased by a factor of 1.7 by oxygen flooding.

  • Czech name

  • Czech description

Classification

  • Type

    J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

  • CEP classification

    JA - Electronics and optoelectronics

  • OECD FORD branch

Result continuities

  • Project

  • Continuities

    Z - Vyzkumny zamer (s odkazem do CEZ)

Others

  • Publication year

    2010

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Name of the periodical

    Nuclear Instruments & Methods in Physics Research Section B

  • ISSN

    0168-583X

  • e-ISSN

  • Volume of the periodical

    268

  • Issue of the periodical within the volume

    17-18

  • Country of publishing house

    NL - THE KINGDOM OF THE NETHERLANDS

  • Number of pages

    8

  • Pages from-to

  • UT code for WoS article

    000281498900033

  • EID of the result in the Scopus database