Radicals and ions in magnetron sputtering discharges in noble gases
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F19%3A00517476" target="_blank" >RIV/68378271:_____/19:00517476 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Radicals and ions in magnetron sputtering discharges in noble gases
Original language description
The chapter deals with mass spectrometric characterization of atoms, radicals and ions in magnetron sputtering discharges generated in Ne, Ar, Kr and Xe gases. In these discharges, different kinds of species such as gas and metal atoms, radicals, negative and positive ions according to the magnetron target and the kind of sputtering gas used are generated. The amount of individual species and ion energy distribution functions as a function of the sputtering gas pressure and the magnetron power are investigated in detail.
Czech name
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Czech description
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Classification
Type
C - Chapter in a specialist book
CEP classification
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OECD FORD branch
10305 - Fluids and plasma physics (including surface physics)
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2019
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Book/collection name
Horizons in World Physics
ISBN
978-1-53614-712-4
Number of pages of the result
61
Pages from-to
56-116
Number of pages of the book
228
Publisher name
Nova Science Publishers Inc
Place of publication
New York
UT code for WoS chapter
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