Efficiency of Collection of the Secondary Electrons in SEM.

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F03%3A12030022" target="_blank" >RIV/68081731:_____/03:12030022 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Efficiency of Collection of the Secondary Electrons in SEM.

Original language description

Great effort has been invested into upgrading the image resolution in SEM up to some 1nm at 15 keV. However, uncertainty still exists as regards proper appearance of even standard testing specimens. The same energy, current and impact angle of the primary beam and the same type of the secondary electron (SE) detector do not secure identical image contrast. Many details regarding generation, collection and detection of the signal species are important and a quantitative method of the detector assessmentis needed. Magnetic and electrostatic fields in the specimen vicinity surely influence the SE trajectories toward detector and these fields vary with the working distance, with arrangement of grounded metallic parts in the specimen chamber, etc. The recently opened systematic study of this problem was started by examination of the collection efficiency.

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

JA - Electronics and optoelectronics

OECD FORD branch

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Project

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Continuities

Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2003

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Microscopy and Microanalysis

ISSN

1431-9276

e-ISSN

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Volume of the periodical

9

Issue of the periodical within the volume

Sup. 3

Country of publishing house

US - UNITED STATES

Number of pages

2

Pages from-to

108-109

UT code for WoS article

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EID of the result in the Scopus database

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