Comparison of imaging with SE ionization and BSE scintillation detector in ESEM.
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F03%3A12030031" target="_blank" >RIV/68081731:_____/03:12030031 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Comparison of imaging with SE ionization and BSE scintillation detector in ESEM.
Original language description
Environmental scanning electron microscopy (ESEM) or low-vacuum scanning electron microscopy (LV SEM) enables the visualisation of samples in a gaseous environment at the pressure of the specimen chamber from 1 Pa to over 1000 Pa. Detection of signal electrons, namely secondary electrons (SEs) cannot be realised in a gaseous environment of the specimen chamber in the same way as for the high vacuum SEM, because high voltage of the Everhart-Thornley detector is not compatible with the conductance of thelow vacuum environment [1]. For this reason, gaseous ions which are ionised by SEs from the specimen are used for the detection in ESEM. For the detection of the backscattered electrons (BSEs), conventional scintillation detector is the best to use.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
JA - Electronics and optoelectronics
OECD FORD branch
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Result continuities
Project
<a href="/en/project/GA102%2F01%2F1271" target="_blank" >GA102/01/1271: Study of detection methods and systems in extreme conditions of environmental scanning electron microscopy</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2003
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Proceedings of the 6th Multinational Congress on Microscopy - European Extension.
ISBN
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ISSN
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e-ISSN
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Number of pages
2
Pages from-to
487-488
Publisher name
Croatian Society for Electron Microscopy
Place of publication
Zagreb
Event location
Pula [HR]
Event date
Jun 1, 2003
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
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