Green Light Interferometry for Metrological SPM Positioning
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F09%3A00335098" target="_blank" >RIV/68081731:_____/09:00335098 - isvavai.cz</a>
Alternative codes found
RIV/00177016:_____/09:#0000354
Result on the web
—
DOI - Digital Object Identifier
—
Alternative languages
Result language
angličtina
Original language name
Green Light Interferometry for Metrological SPM Positioning
Original language description
We present an arrangement for dimensional metrology of nanostructures based on various techniques of scanning probe microscopy (SPM) combined with a precision positioning of a sample. The system was developed to operate at and in cooperation with the Czech metrology institute for calibration purposes and nanometrology. Traceability of the position monitoring and control of the scanning stage is ensured by full six axes interferometric displacement measurements. The interferometers are supplied from a frequency doubled Nd:YAG laser stabilized by linear absorption spectroscopy in molecular iodine.
Czech name
—
Czech description
—
Classification
Type
D - Article in proceedings
CEP classification
BH - Optics, masers and lasers
OECD FORD branch
—
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2009
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
MOC'09 - 15th Microoptics Conference
ISBN
978-4-86348-037-7
ISSN
—
e-ISSN
—
Number of pages
2
Pages from-to
—
Publisher name
Microoptics Group (OSJ/JSAP)
Place of publication
Tokyo
Event location
Tokyo
Event date
Oct 25, 2009
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
—